In this study, the effects of oxygen flow rate and annealing temperature on Gd2O3 structures and optical properties were systematically analyzed. Gd2O3 films were deposited on both quartz and ZnS substrates by magnetron sputtering and then annealed under vacuum at 700, 800 and 900℃, Restructure and phase transformation from cubic to monoclinic occur at different temperatures depending on the oxygen flow rate. The optical band gap, which is more sensitive to the annealing temperature than oxygen flow rate changes from 5.32 to 5.65 eV. The refractive index is approximately 1.75 at 550 nm and is adjustable by the oxygen flow rate. The transmittance of the ZnS substrate with Gd2O3 film exceeds 80% and reaches82% at the 7.5-9.5 μm range. When ZnS is coated on both sides, the transmittance is increased to approximately 90%. Our results indicate that Gd2O3 films are promising new candidates for anti-reflective coatings in the infrared region.
类型: 期刊论文
作者: Zhenhuai Yang,Lei Yang,Bing Dai,Pei Lei,Shuai Guo,Peng Wang,Qiang Wang,Yujie Ding,Yumin Zhang,Jiecai Han,Jiaqi Zhu
来源: Journal of Rare Earths 2019年04期
年度: 2019
分类: 工程科技Ⅰ辑,工程科技Ⅱ辑
专业: 无机化工,材料科学,工业通用技术及设备
单位: Center for Composite Materials and Structures, Harbin Institute of Technology,Center of Analysis Measurement, Harbin Institute of Technology,Beijing Institute of Aeronautical Materials,Key Laboratory of Micro-systems and Micro-structures Manufacturing, Ministry of Education
基金: supported by the National Science Fund for Distinguished Young Scholars(51625201),National Key Research and Development Program of China(2016YFE0201600),National Natural Science Foundation of China(51372053),Innovative Research Group of National Natural Science Foundation of China(11421091),International Science&Technology Cooperation Program of China(2015DFR50300),the Major State Basic Search Program(2014CB46505)
分类号: TQ133.3;TB383.2
页码: 410-415
总页数: 6
文件大小: 1110K
下载量: 5
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