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A comparison of emissive and cold floating probe techniques for electric potential measurements in rf inductive discharge

论文摘要

A cold floating probe method was compared with the emissive floating probe method in terms of a low-pressure radio-frequency inductive discharge.The dependences of difference between the plasma potential and the floating potential on the electron temperature 1-8 eV, plasma density 109-1012cm-3 and magnetic field 100-650 G were obtained.It was demonstrated that the difference between the potentials that obtained by these two methods can differ significantly from the expected value of 5.2 kTe/e for argon.

论文目录

  • 1. Introduction
  • 2. Experimental setup and measuring methods
  • 3. Results
  • 4. Conclusions
  • 文章来源

    类型: 期刊论文

    作者: Yaroslav MURZAEV,Gennadii LIZIAKIN,Andrey GAVRIKOV,Rinat TIMIRKHANOV,Valentin SMIRNOV

    来源: Plasma Science and Technology 2019年04期

    年度: 2019

    分类: 基础科学,工程科技Ⅱ辑

    专业: 核科学技术,电力工业

    单位: Joint Institute for High Temperatures of the Russian Academy of Sciences

    基金: supported by the Russian Science Foundation(project No.14-29-00231)

    分类号: TM623

    页码: 98-102

    总页数: 5

    文件大小: 1046K

    下载量: 1

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