论文摘要
Transparent conductive oxides have attracted escalating research interest for integrated photonic devices and metasurfaces due to the extremely large electro-optic modulation of the refractive index by the free-carrier-induced plasma dispersion effect. In this paper, we have designed and fabricated a silicon microring resonator using an indium-tin oxide gate as the electric-tuning electrode. It achieved an ultralarge resonance wavelength tunability of 271 pm/V, which is obtained through the reduced width of the ring waveguide and a high-dielectric-constant Hf O2 insulator. We demonstrated a broad resonance wavelength tuning range of over 2 nm with an ultrafast response time of less than 12 ns and near-zero static power consumption, which outperforms traditional thermal tuning.
论文目录
文章来源
类型: 期刊论文
作者: ERWEN LI,BEHZAD ASHRAFI NIA,BOKUN ZHOU,ALAN X.WANG
来源: Photonics Research 2019年04期
年度: 2019
分类: 基础科学,信息科技
专业: 物理学,无线电电子学
单位: School of Electrical Engineering and Computer Science, Oregon State University
基金: Air Force Office of Scientific Research(AFOSR)(FA9550-17-1-0071)
分类号: TN751.2;TN256
页码: 473-477
总页数: 5
文件大小: 1854K
下载量: 3
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